Analysis Of Top Mirror Vision Broken in TSP (Test Scan Pack) Machine

Abstract

Top Mirror Vision is a critical optical component in the Test Scan Pack (TSP) machine that affects inspection accuracy in semiconductor manufacturing. Damage to the mirror surface can reduce image quality and lead to inspection errors. This study aims to identify the root cause of Top Mirror Vision damage and develop an improvement to reduce its occurrence. A Fishbone Diagram and root cause validation were used to analyze the problem. The analysis identified direct contact between the air gun nozzle and the mirror surface during manual cleaning as the main cause of damage. To address this issue, a semi-automated cleaning system utilizing controlled airflow was designed and implemented. The results showed that the number of Top Mirror Vision broken incidents decreased from 7 cases to 0 cases, achieving a 100% reduction. The proposed system also improved cleaning consistency and inspection stability. Therefore, the semi-automated cleaning system proved to be an effective solution for reducing Top Mirror Vision damage in the TSP machine.